Zhang Y, Liu F, Huang Y. Microlens Array based on SiNx Metasurface for CMOS Image Sensor[100]//Asia Communications and Photonics Conference. Optical Society of America, 2020

Abstract:

Different from traditional microlens array requiring complicated fabrication processes, SiN x metasurface microlens array is designed, which has simplified the manufacturing process and indicates the ability of light beam focusing spanning from visible to near-infrared region.